采用气源分子束外延技术生长了GaAs/AlGaAs束缚态向连续态跃迁的太赫兹量子级联激光器材料,基于半绝缘等离子体波导工艺制作了太赫兹量子级联激光器.测量了激光器的发射光谱和功率-电流-电压关系曲线,研究了器件的激光特性.器件激射频率约2.95 THz,脉冲模式下,最高工作温度为67 K.连续波模式下,阈值电流密度最低为230 A/cm2,最大光输出功率1.2 mW,最高工作温度为30 K. A terahertz quantum cascade laser material with GaAs / AlGaAs bound state to continuous state transition was grown by gas source molecular beam epitaxy and a terahertz quantum cascade laser was fabricated based on semi-insulating plasma waveguide. The emission spectra and The laser characteristics of the device were studied.The laser lasing frequency was about 2.95 THz and the maximum operating temperature was 67 K. In the continuous mode, the threshold current density was the lowest at 230 A / cm2, and the maximum Light output power of 1.2 mW, the maximum operating temperature of 30 K.