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本文用表面能、界面能来说明真空蒸镀薄膜与基材的吸附机理。如薄膜与基材间的界面能越低，说明其键合越强，附着越牢固。基材表面事先经离子轰击或等离子处理形成的结构缺陷，将有利于降低界面能，增强附着力。
In this paper, the surface energy and interface energy can be used to illustrate the adsorption mechanism of vacuum evaporation film and substrate. If the interface between the film and the substrate can be lower, indicating that the stronger the bond, the more solid adhesion. Structural defects formed by ion bombardment or plasma treatment on the surface of the substrate in advance reduce the interfacial energy and enhance the adhesion.