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通过正交实验获得了Ti50Al50N涂层的最佳工艺参数和各个工艺因素对其性能的影响,在此最佳工艺的同一条件下制备了不同Al含量的TiAlN涂层,利用X射线衍射、扫描电镜、高分辨透射电镜和纳米压痕仪分别对微观结构和力学性能进行了表征和测量。结果表明:随着Al含量的增加,硬度和弹性模量逐渐增加。当Al含量为40%时,硬度和弹性模量达最大值分别达到38、392 GPa;进一步增加Al含量,硬度和弹性模量不断降低。
Through the orthogonal experiment, the optimum technological parameters of Ti50Al50N coating and its influence on the properties of Ti50Al50N coating were obtained. TiAlN coatings with different Al contents were prepared under the same conditions. The XRD, SEM, , High-resolution transmission electron microscopy (TEM) and nanoindentation were used to characterize and measure the microstructure and mechanical properties respectively. The results show that with the increase of Al content, the hardness and elastic modulus increase gradually. When the content of Al is 40%, the maximum hardness and elastic modulus reach 38,392 GPa, respectively. When the Al content is further increased, the hardness and elastic modulus decrease continuously.