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无衍射光的中心光斑直径很小,且在传播方向上其尺寸不随传播距离而变化.将其应用于直线度误差测量系统,可以获得较高的测量精度.研究了无衍射光束的特性及其实现方法,给出了测量系统的结构和参数.理论分析和实验表明这种新型测量系统可满足高精度测量的要求.
The center spot of the non-diffracted light has a small diameter and its size does not change with the propagation distance in the propagation direction. Applying it to the straightness error measurement system can achieve higher measurement accuracy. The characteristics of the non-diffracted beam and its implementation are studied, and the structure and parameters of the measurement system are given. Theoretical analysis and experiments show that this new measurement system can meet the requirements of high-precision measurement.