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本文研究了硅基双层微机械悬臂梁在光热激励下的挠曲特性和频率特性 ,并利用建立的数学模型进行了模拟和优化。从而为新型传感器的研制提供了理论分析和优化设计的基础
In this paper, the flexural and frequency characteristics of a two-layer silicon-based micro-mechanical cantilever beam under light-heat excitation are studied and simulated and optimized using the established mathematical model. So as to provide a theoretical basis for the development of new sensors and optimize the design basis