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报道了用质子交换法在铌酸锂晶体和同化学剂量比铌酸锂晶体中形成了光波导,在633和1539nm波长下,用棱镜耦合法测量了波导的暗模特性;端面耦合得到波导的近场光强分布,与普通铌酸锂质子交换形成光波导的近场输出相比,输出光强均匀而且比较亮,说明在同化学剂量比的铌酸锂中形成的光波导质量要好些.对普通铌酸锂晶体质子交换光波导,研究了波导退火特性,经过退火,折射率分布由阶跃型转变成渐变型的,退火的时间越长,折射率分布变化的趋势越缓慢;并给出了不同交换时间下样品的RBS/Channeling谱,与未进行交换的样品相比,质子交换铌酸锂的沟道谱的产额有增高,而且交换时间的越长,产额增高的越多.
The proton exchange method was used to form optical waveguides in lithium niobate crystals and lithium niobate crystals at the same chemical dose ratio. The prismatic coupling method was used to measure the dark mode characteristics of the waveguides at 633 and 1539 nm wavelengths. Near-field light intensity distribution, compared with the ordinary near-field output of the optical waveguide formed by lithium niobate proton exchange, the output light intensity is uniform and relatively bright, indicating that the quality of the optical waveguide formed in the lithium niobate with the same chemical dose ratio is better. For ordinary lithium niobate crystal proton exchange optical waveguides, the annealing characteristics of the waveguide are studied. After annealing, the refractive index distribution changes from step type to gradual type. The longer the annealing time, the more the refractive index distribution changes slowly. The RBS / Channeling spectra of the samples at different exchange times show an increase in the channel yield of the proton-exchanged lithium niobate compared to the non-exchanged samples, and the longer the exchange time, the higher the yield .