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微加工方法类别微机电系统(MEMS)的制造技术,无论微型惯性测量组合(MIMU),或是其它应用领域的各种MEMS,均涉及到其各主要组成单元的设计、材料、微加工、测试、控制等有关技术,它们与常规的机电系统的设计、制造技术是有较大差别的。MEMS的设计必须考虑到各种力的尺寸效应,以及其它微机械特性、微摩擦性能等。纳米材料的性能也有其特点,例如用一般陶瓷材料制成的器件,质硬且脆,极易碰碎,而以纳米大小的粒子制成的
Micromachining Method Categories Microelectromechanical systems (MEMS) manufacturing technology, regardless of micro-inertial measurement portfolio (MIMU), or a variety of other MEMS applications, involve the design, materials, micromachining, testing , Control and other related technologies, which are quite different from the conventional mechanical and electrical systems design and manufacturing technology. MEMS design must take into account the size effect of various forces, as well as other micro-mechanical properties, micro-friction properties. Nanomaterials also have their own characteristics, such as devices made of common ceramic materials, which are hard and brittle, easily broken, and made of nano-sized particles