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为了解决实际测量中单一测量方法存在的局限性,结合白光干涉测量技术与共聚焦测量技术,通过紧凑型部分共光路结构原则,设计并搭建了一套超精密表面形貌光学测量系统,实现微纳米几何形貌的三维重构与测量。基于C#语言与DirectX11开发组件,开发了上位机执行软件,实现了两种光学测量模式下硬件的协调控制及纳米标准样板表面形貌的三维重构。对台阶高度标定值为(98.8±0.6)nm的台阶标准样板进行测量,实验表明:用白光干涉测量模式和共聚焦测量模式分别实现了对台阶样板的大范围快速测量和小范围精密测量,10次测量的平均值分别为100.5和99.8 nm,标准差均小于2 nm,说明该系统能较好地满足微纳器件超精密表面形貌测量的要求。
In order to solve the limitations of the single measurement method in actual measurement, a set of ultra-precision optical surface measurement system was designed and constructed based on the principle of compact partial common-mode optical path by combining white light interferometry and confocal measurement. Three Dimensional Reconstruction and Measurement of Geometric Topography. Based on C # language and DirectX11 development kit, a host computer executive software was developed to realize the coordination control of the hardware in two optical measurement modes and the three-dimensional reconstruction of the surface morphology of the nano-standard template. The step standard model with a step height calibration value of (98.8 ± 0.6) nm is measured. The experiment shows that the large-area rapid measurement and the small-scale precision measurement of the step model are achieved respectively by the white light interference measurement mode and the confocal measurement mode. The mean values of the measurements are 100.5 and 99.8 nm, respectively, and the standard deviations are both less than 2 nm, indicating that the system can better meet the requirements of ultra-precision surface topography measurement of micro / nano devices.