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为了控制具有长行程的液氮致冷干涉仪的可移动镜面在非常精确的范围内运动,应用了气体润滑滑板作为移动平台。获得了这样的控制:直线轨迹的锥角偏差小于0.6328μm波长的1/5;在平移4.7cm时,转动稳定性在1/10秒之内;在3.5×10~4g~2/HZ的纯噪音振动的环境下工作时,滑板在垂直于驱动轴线方向上的位移小于0.1μm。选用气体润滑的主要原因是它的低摩擦,没有静摩擦,以及能在+25℃至-196℃的温度范围内工作。为了利用致冷剂蒸发而得的气体,轴承间隙做得尽可能地小。轴承刚性是这样设计的,供气压力的变化能引起滑板位置的相应变化,这种特性允许滑板被应用于反馈系统中,从而提供在高振幅、低频率振动下滑板的压力控制。这种滑板用于具有视场补偿的迈克尔逊干涉他,可以改进高分辨率的分光镜的技术状态。
In order to control the moveable mirror of a liquid nitrogen-cooled interferometer with a long stroke to move in a very precise range, a gas-lubricated slide is used as a moving platform. Such control was obtained that the deviation of the taper angle of the straight-line trajectory was less than 1/5 of the wavelength of 0.6328 μm, that the rotation stability was within 1/10 second at a displacement of 4.7 cm, that the pure linear velocity at 3.5 × 10 -4 g -2 / HZ When working under the environment of noise and vibration, the displacement of the sliding plate in the direction perpendicular to the driving axis is less than 0.1 μm. The main reason for using gas lubrication is its low friction, no static friction, and can work in the temperature range of +25 ℃ to -196 ℃. In order to utilize the gas evaporated by the refrigerant, the bearing clearance is made as small as possible. Bearing stiffness is designed such that changes in the supply pressure cause a corresponding change in the position of the slide, a feature that allows the slide to be used in the feedback system to provide pressure control of the slide under high amplitude, low frequency vibrations. This skateboard is used by Michelson to interfere with field compensation and can improve the technical state of high-resolution beamsplitters.