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用离子束辅助沉积技术在9Cr18钢基体上形成了TiCxNy膜。TEM观察膜呈多晶结构,具有(111)、(200)和(220)择优取向。AES和XPS分析进一步证实,TiCxNy膜呈含氧配置。膜的硬度与N含量有关,N的含量过高时硬度下降。在本实验条件下以离子注量为3x1017/cm2时硬度最高,干摩擦表明膜的抗氧化性能优良,它的存在能有效抑制基体在摩擦过程中氧化皮的形成,显著改善基体的磨损特性,并能使基体由粘着磨损向磨粒磨损转化.
TiCxNy films were formed on the 9Cr18 steel substrate by ion beam assisted deposition. TEM observation of the film was polycrystalline structure with (111), (200) and (220) preferred orientation. AES and XPS analysis further confirmed that the TiCxNy film was in an oxygen-containing configuration. Film hardness and N content, N content is too high hardness decreases. Under the experimental conditions, the hardness is the highest when the ion fluence is 3 × 10 17 / cm 2, and the dry friction indicates that the film has excellent oxidation resistance. The existence of the film can effectively suppress the formation of oxide scale during the rubbing process and remarkably improve the wear characteristics of the matrix. And can make the substrate from the adhesive wear to abrasive wear transformation.