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近廿多年来对高频感应耦合等离子体炬进行了很多理论研究和实验,也发展了一些不同结构型式的等离子体炬。本文全面地分析等离子体炬设计及重要参数选择的依据和方法,特别对金属水冷等离子体炬进行了详细的分析和讨论。
Nearly 20 years of high frequency induction coupled plasma torch has done a lot of theoretical research and experiments, but also developed a number of different types of plasma torches. This paper comprehensively analyzes the basis and method of plasma torch design and important parameter selection, and especially analyzes and discusses the metal water-cooled plasma torch in detail.