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研制了一种实用性强的零差激光干涉仪,采用立方角锥棱镜代替平面反射镜,克服了传统激光干涉仪光路调节困难的问题,并将其应用到大量程的位移测量中。研究了该改进型零差激光干涉仪的位移测量原理及信号处理方法。实验中,使用PI公司高精度的商用导轨来标定测量结果,通过比较测量结果来验证干涉仪的性能。实验结果表明,在百毫米级大范围位移测量中该干涉仪的位移测量精度可以达到小于0.7μm。对测量过程中各种可能的误差来源进行了详细的分析,分析结果与实验相符。
A kind of practically used homodyne laser interferometer was developed. The cube pyramid prism was used instead of the plane mirror to overcome the difficulty of adjusting the optical path of the traditional laser interferometer and to apply it to the displacement measurement of large range. The displacement measurement principle and signal processing method of the improved homodyne laser interferometer are studied. In the experiment, the measurement result was calibrated by using PI’s high-precision commercial guide rail and the performance of the interferometer was verified by comparing the measurement results. The experimental results show that the displacement measurement accuracy of the interferometer can reach less than 0.7μm in a wide range of 100 mm displacement measurement. The possible sources of error in the measurement process were analyzed in detail, and the analysis results were in good agreement with the experiment.