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在ＢＴ／Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ 衬底上用溶胶－ 凝胶法制备了ＫＴａ０．５５Ｎｂ０．４５Ｏ３（ＫＴＮ） 薄膜．０ ．５ μｍ ＫＴＮ－ ０．０８ μｍ ＢＴ 薄膜在２５ ℃，１ ．０ ｋＨｚ 时，其εｒ＝ １ １１４，ｔａｎδ＝２ ．５ ％ ；１２ ℃时，其Ｐｒ＝ ２．１ μＣ／ｃｍ２ ，Ｐｓ＝４ ．２ μＣ／ｃｍ２， Ｅｃ＝ ５．８ ｋＶ／ｃｍ ．０ ．５ μｍ厚ＫＴＮ膜的Ｃｕｒｉｅ 温度为３５ ℃；２５ ℃，１ ．０ ｋＨｚ 时，ＫＴＮ 膜的εｒ＝ １ ４１２ ． 估算ＫＴＮ 材料的体积热容Ｃｖ ＝ ２ ．７３ Ｊ／ｃｍ３·Ｋ．ＫＴＮ 薄膜在室温及１０３ ｋＶ／ｃｍ 下极化３０ ｍｉｎ 后，其室温热释电系数ｐ ＝ ５ ．１ ×１０ －７ Ｃ／ｃｍ２·Ｋ，电压响应优值Ｆｖ ＝ １ ．３２ ×１０ －１０ Ｃ·ｃｍ／Ｊ，探测度优值Ｆｄ＝ ３．１５ ×１０ －１０ Ｃ·ｃｍ／Ｊ，该薄膜是一种优异的热释电材料．
KTa0.55Nb0.45O3 (KTN) thin films were prepared by sol-gel method on BT / Pt / Ti / SiO2 / Si substrates. 0. 5 μm KTN-0.08 μm BT film at 25 ° C. At 0 kHz, εr = 1 114 and tan δ = 2. 5%; at 12 ° C, Pr = 2.1 μC / cm2, Ps = 4. 2 μC / cm2, Ec = 5.8 kV / cm. 0. Curie temperature of 5 μm thick KTN film is 35 ℃; At 0 kHz, εr = 1 412 for the KTN film. The volumetric heat capacity of KTN material is estimated as Cv = 2. 73 J / cm3 · K. The KTN film has a room temperature pyroelectric coefficient p = 5 after being polarized at room temperature and 103 kV / cm for 30 min. 1 × 10 -7 C / cm 2 · K, and the voltage response excellent value Fv = 1. 32 × 10 -10 C · cm / J, and the detection value has an excellent value of Fd = 3.15 × 10 -10 C · cm / J. This film is an excellent pyroelectric material.