序言在多层膜工作中,当选定膜层材料和基底以后,准确地控制每一个膜层的厚度对整个膜系的光学性能起着决定性的作用。因此,膜厚控制已成为镀膜技术中的重要环节。在多数情况下,膜层厚度的允差约为2％,在个别情况下,允差可大至5％或10％,通常使用的极值法的精度不容易达到2％,因此,需要使用具有较高精度的其他方法。 INTRODUCTION In multi-layer work, precisely controlling the thickness of each layer plays a decisive role in the optical properties of the overall film system, after the selection of the layer material and the substrate. Therefore, film thickness control has become an important part of coating technology. In most cases, the film thickness tolerance is about 2%, in some cases, the tolerance can be as large as 5% or 10%, the accuracy of the commonly used extreme method is not easy to reach 2%, therefore, the need to use Other methods with higher precision.