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本文对非晶硅太阳能电池制造工艺过程所用的无机氢化物烷类气体硅烷、硼烷、磷烷、甲烷和氢及其混合气的配制与分析方法进行了研究,以微机控制配气、检测程序、气相色谱法分成分析杂质,电容法测水分,方法已应用于工艺过程分析。
In this paper, the methods of preparation and analysis of silane, borane, phosphorane, methane and hydrogen and their mixture of inorganic hydride alkane gas used in the manufacturing process of amorphous silicon solar cell were studied. , Gas chromatography is divided into analysis of impurities, capacitance measurement of water, the method has been used in process analysis.