1 引言 由于医学、生态学和其他领域的应用,人们十分关注小型重复率DF激光器的研究。从提高激光功率、稳定性和转换效率等看,这种激光器的结构最佳化是重要的。 为了使DF脉冲重复率激光器达到极限参数,除了发展紧凑的放电室、脉冲电源和形成稳定体积放电的预电离方法之外,还必须使工作混合气体成份和气压最佳化,并保证放电室电极间隔内的气流均匀性。 脉冲重复率的提高,对激光器工作体积内的主放电注入能量的均匀性和工作混合气体密度的均匀性,都提出了严格的要求。为了使电极之间的工作混合气体漂移率保持在推荐的范围内,需要减小放电室主电极宽度,而这会导致放电均匀性劣化,电极的相应外形和放电室 1 Introduction Due to medical, ecological and other fields of application, people are very concerned about the small repetition rate DF laser research. Optimizing the structure of this laser is important from the standpoint of increasing laser power, stability and conversion efficiency. In order to reach DF pulse repetition rate lasers up to the limit parameter, in addition to the development of compact discharge cells, pulsed power supplies and preionization methods for stable volume discharges, the working mixture gas composition and pressure must be optimized and the discharge cell electrodes Airflow uniformity during the interval. Increasing the pulse repetition rate places strict requirements on the uniformity of the primary discharge energy injected in the laser’s working volume and the density of the working gas mixture. In order to keep the working mixed gas drift rate between the electrodes within the recommended range, it is necessary to reduce the width of the main electrode of the discharge chamber, which leads to the deterioration of the discharge uniformity, and the corresponding shape of the electrode and the discharge chamber