论文部分内容阅读
对三光束实时横向剪切干涉仪进行了全面深入的分析，导出了其位相测量原理及误差公式。分析表明三光束干涉相叠加产生的信号具有二倍频分量，与通常双光束干涉有根本区别，但是适当地使用这个信号并不会导致测相原理的复杂化，相反，还会降低测量方法的理论误差。
The three-beam real-time transverse shear interferometer was analyzed thoroughly and its phase measurement principle and error formula were derived. The analysis shows that the signals generated by the superposition of the three beams have a double frequency component, which is fundamentally different from the ordinary two-beam interference. However, proper use of this signal does not complicate the principle of the phase measurement. On the contrary, Theoretical error.