利用极化中子反射技术较系统地研究了CoFe/TiZr复合多层膜材料界面结构,结果表明.1)从多层膜超镜传输特性角度考虑,等厚对层不如非等厚对层膜结构好.2)等厚对层的最佳退火温度约250℃,非等厚对层退火温度低于250℃影响不明显,等厚和非等厚对层经350℃退火后膜层变化严重.3)从布拉格峰位变化看,随着退火温度的升高,等厚对层膜的厚度先变小后变大;非等厚对层与之相反. The interfacial structure of CoFe / TiZr composite multilayers was investigated systematically using polarized neutron reflection technique. The results show that: 1) From the perspective of the super-mirror transmission characteristics of multilayers, Structure is good.2) The optimum annealing temperature of isopipeline is about250 ℃, and the effect of non-same thickness on the annealing temperature is less than250 ℃. .3) From the change of peak position in Prague, with the increase of annealing temperature, the thickness of the layer becomes smaller and then becomes larger;