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(期‘页) ·MEMs论坛·中国艇MS的研究与开发进程…………………………(1’1)微小型无人系统发展及其对测试技术的新挑战………(1。4)MEMs传感器性能提高相关技术研究……………………(1。8)微/纳机电系统…………………………………‘………一(2。1)Ⅷm中薄膜热物性测试方法研
(期 期间) · MEMs Forum · Research and Development Process for Chinese MS (1’1) Development of Micro-Unmanned Systems and New Challenges for Testing Technologies ......... ( 1.4) MEMs sensor performance improvement related research ........................ (1.8) Micro / nano mechanical and electrical systems ................................................................................. (2). 1) Ⅷ m thin film thermal properties of test methods