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全球领先的微电子制造表面处理设备供应商FSI国际有限公司近日宣布其带有ViPR~(TM)技术的ZETA~喷雾式清洗系统现已提供200mm晶圆工艺,并且已有一家亚洲客户将该项技术成功应用于200mm制造之中。
FSI International Ltd., the world’s leading supplier of microelectronic manufacturing surface treatment equipment, today announced that its ZETA ~ spray cleaning system with ViPR ™ technology is now available in a 200mm wafer process and an Asian customer The successful application of technology in 200mm manufacturing.