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报道了Pd薄膜电阻率温度系数(TCR)随不同薄膜厚度和不同退火温度的变化.实验结果表明:薄膜TCR值远小于体材料的值,且对晶粒尺寸有一定的依赖关系;薄膜晶粒尺寸越大,其TCR值也越大。采用晶粒间界散射的二流体模型对此结果进行了讨论。
The change of the temperature coefficient of resistivity (TCR) of Pd films with different film thicknesses and different annealing temperatures was reported. The experimental results show that the TCR value of the film is much smaller than that of the bulk material and has a certain dependence on the grain size. The larger the film size, the larger the TCR value. The results are discussed using a two-fluid model of intergranular scattering.