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介绍了一种可提高非球曲面超精密加工机床的轮廓跟踪精度的误差补偿控制方法。该轮廓补偿控制器是机床轮廓位置伺服系统的一部分,它以二次曲线代替原微直线段来逼近给定轮廓,可提高系统的轮廓逼近精度,并减小插补数据不连续对伺服系统的冲击,从而最终提高轮廓的加工精度。
An error compensation control method that can improve the contour tracking accuracy of the aspheric surface ultraprecision machining machine is introduced. The contour compensation controller is a part of the machine tool’s contour position servo system. It approximates a given contour by using the quadratic curve instead of the original micro-straight line segment, which can improve the approximation accuracy of the system and reduce the discontinuity of the interpolation data to the servo system Impact, and ultimately improve the accuracy of contouring.