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采用Langmuir探针测定了不同磁场闭合状态下辉光放电环境中的电子温度(Te)、电子密度(ne)及离子密度(ni)空间分布状态,探讨了磁场闭合度对CrNx镀层沉积效率的影响机理。结果表明:三种磁场闭合状态下,电子温度都在靶面处最高,相邻靶间对称面最低,真空腔内部出现一个直径约240 mm的均匀中心区域;电子密度和离子密度在三种条件下均于真空腔中心处最高,边缘处最低,而随磁场闭合度的整体变化规律表现为这两个参数值在不闭合状态时小于半闭合和完全闭合状态时;完全闭合状态下镀层的厚度明显大于半闭合和不闭合状态下的镀层厚度。
Langmuir probe was used to determine the spatial distribution of electron temperature (Te), electron density (ne) and ion density (ni) in the glow discharge environment with different magnetic fields closed, and the effect of magnetic field closure on the deposition efficiency of CrNx coating mechanism. The results show that the electron temperature is the highest at the target surface and the lowest is the symmetry plane between adjacent targets in the closed state of the three magnetic fields. A uniform central region with a diameter of about 240 mm appears in the interior of the vacuum chamber. The electron density and ion density are in three different conditions The highest in the center of the vacuum chamber and the lowest in the edge. The overall variation with the closing degree of the magnetic field is that the values of the two parameters are less than the semi-closed and the fully closed state in the non-closed state; the thickness of the fully closed state Significantly greater than half-closed and non-closed state coating thickness.