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本文设计了一种用于激光偏转扫描的微反射镜 ,使用微结构对激光光束实现高频率、高效率、大角度偏转。通过理论计算 ,该微反射镜可以 80 0Hz频率、40°偏转角进行激光扫描。
In this paper, a micromirror used for laser deflection scanning is designed. The microstructure is used to realize high-frequency, high-efficiency and large-angle deflection of the laser beam. Through theoretical calculation, the micromirror can scan the laser at 80 0Hz frequency and 40 ° deflection angle.