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美NASA Lewis研究中心发表了一份报告,介绍利用甲烷或乙烷气体采用低频等离子沉积技术在室温下制造一种非晶碳氢(a-C:H)薄膜。这种薄膜具备以下奇特的性质:(a)它们可附着在各种各样的材料上(包括石英绝缘体、半导体和金属);(b)它们仅含碳和氢;(c)它们非常光滑无任何孔洞;(d)它们能耐潮湿和化学腐蚀;
A NASA Lewis research center published a report on the use of low-frequency plasma deposition of methane or ethane gas to produce an amorphous hydrocarbon (a-C: H) film at room temperature. Such films have the following peculiar properties: (a) They can be attached to a wide variety of materials (including quartz insulators, semiconductors and metals); (b) They contain only carbon and hydrogen; (c) They are very smooth Any hole; (d) They are resistant to moisture and chemical attack;