论文部分内容阅读
设计了由压电陶瓷施压的柔性变焦镜的结构。根据弹性力学建立了相应的数学模型,采用有限元法计算了镜面受力的挠变形值。当柔性变焦镜最大挠度为9μm时,镜面的曲率半径从610mm变至590mm,此时采用环形筋条结构的反射镜镜面和理想球面的面形偏差PV值仅为1μm,面形相对偏差为0.3%。
The structure of a flexible zoom lens pressed by piezoelectric ceramics was designed. The corresponding mathematical model is established according to the elasticity theory, and the deflection value of the mirror surface force is calculated by the finite element method. When the maximum deflection of the flexible zoom lens is 9μm, the radius of curvature of the mirror surface changes from 610mm to 590mm. At this time, the surface shape deviation of the mirror mirror surface and the ideal spherical surface with the annular rib structure is only 1μm, and the relative deviation of the surface shape is 0 .3%.