目前,苏联和其他一些国家十分关注采用微电子学的方法和设备来制造一次机电转换传感器,其中包括在各种科学技术领域中应用的压力测量传感器。在这类传感器中,感压元件是一块薄的平膜片,它是由单晶硅制成。传感器晶体的制备过程是建立在集成电路工艺的基础上,因此引入了“集成”这个词,以反映出所述传感器的特点。 At present, the Soviet Union and other countries are very concerned about the use of microelectronic methods and equipment to manufacture a mechanical and electrical conversion sensors, including pressure measurement sensors used in various fields of science and technology. In this type of sensor, the pressure sensing element is a thin, flat diaphragm made of monocrystalline silicon. The preparation of the sensor crystal is based on integrated circuit technology, so the word “integrated” has been introduced to reflect the characteristics of the sensor.