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本文叙述了应用于可变矩形电子束曝光系统中的几种信号检测和处理技术以及在调试过程中的应用，简单介绍了系统工作时信号间的相互关系。
This paper describes several signal detection and processing techniques used in a variable rectangular electron beam exposure system and its application in the debugging process, and briefly introduces the interrelationship between signals during system operation.