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通过LIGA技术与微细电火花技术相结合 ,可以在硬质合金、不锈钢等材料上加工出微结构 ,这一新的方法必将拓宽微细加工的能力和应用范围。利用LIGA技术制备线宽 70 μm、厚度达 73 0 μm的铜工具电极 ,采用微细电火花技术在不锈钢片上加工出线宽 90 μm、具有复杂形状的微结构。
Through the combination of LIGA technology and micro-EDM technology, micro-structure can be processed on cemented carbide, stainless steel and other materials. This new method will broaden the capability and application range of micro-machining. The LIGA electrode was used to fabricate a copper tool electrode with a width of 70 μm and a thickness of 73 μm. The surface of the stainless steel sheet was machined with 90 μm wire width and a complex microstructure by micro-EDM.