论文部分内容阅读
采用微波PCVD方法制备出直径50mm膜厚300μm的大尺寸透明自支撑金刚石膜。在甲烷体积分数2%的条件下制备的透明自支撑金刚石膜经过两面抛光后在500cm-1~4000cm-1红外波段范围内红外透过率达到70%,但是其生长速率只有1μm/h~2μm/h。在体积分数4%甲烷浓度下制备的自支撑透明金刚石膜,其生长速率达到7μm/h~8μm/h,经过两面抛光之后膜厚为260μm的金刚石膜的在500cm-1~4000cm-1红外波段范围内红外透过率达到60%左右,而且膜中心和边缘区的红外透过率基本相同。这些结果为大尺寸金刚石厚膜在红外窗口上的实际应用奠定了基础。
A large-size transparent self-supporting diamond film with a diameter of 50mm and a film thickness of 300μm was prepared by microwave PCVD method. The transparent self-supporting diamond film prepared under the condition of 2% of the volume fraction of methane has an infrared transmittance of 70% in the infrared range of 500 cm-1 to 4000 cm-1 after double-side polishing, but its growth rate is only 1 μm / h to 2 μm / h. The self-supporting transparent diamond film prepared at a volume fraction of 4% methane concentration has a growth rate of 7 μm / h to 8 μm / h. After being subjected to double-side polishing, a diamond film with a film thickness of 260 μm in the infrared region of 500 cm -1 to 4000 cm -1 Infrared transmittance within the range of 60%, and the center of the film and the edge of the infrared transmittance is basically the same. These results lay the foundation for the practical application of large-size diamond thick film on the infrared window.