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甚长波红外波段富含大气湿度、CO_2含量及云层结构和温度轮廓等大量信息,是大气遥感的重要组成部分。设计了一种32×32甚长波红外焦平面阵列,采用在ZnCdTe衬底上液相外延生长的As掺杂p型材料上进行B+离子注入形成光敏元,通过铟柱倒焊技术和带有改进型背景抑制结构的读出电路互联,制成截止波长达到14滋m的焦平面器件。该红外焦平面器件像元面积为60滋m×60滋m,工作温度在50 K温度下。测试结果显示:读出电路性能良好,焦平面黑体响应率达到1.35×107V/W,峰值探测率为2.57×10~(10)cmH z~(1/2)/W,响应率非均匀性约为45%,盲元率小于12%。
Very longwave Infrared band is rich in atmospheric humidity, CO 2 content and cloud structure and temperature profiles and other large amounts of information, is an important part of atmospheric remote sensing. A 32 × 32 long wavelength infrared focal plane array was designed. The B + ions were implanted into the As-doped p-type material grown on the ZnCdTe substrate by liquid phase epitaxy to form the photosensors. Type background suppression structure of the readout circuit interconnection, made of cutoff wavelength of 14 nm focal plane devices. The infrared focal plane device pixel area of 60 Zi m × 60 Zi m, the working temperature at 50 K temperature. The test results show that the readout circuit has a good performance. The response rate of the blackbody in the focal plane reaches 1.35 × 107V / W and the peak detection rate is 2.57 × 10 ~ (10) cmH ~ (1/2) / W. The nonuniform response Is 45%, the blind element rate is less than 12%.