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本文报导了在掺半导体玻璃波导上用离子刻蚀的方法制备出了表面刻蚀光栅耦合器。观察到了光栅耦合器的耦合效率随着输入激光功率增加而下降的功率限制作用。
This paper reports the preparation of a surface-etched grating coupler by ion etching on a semiconductor-doped glass waveguide. The power limiting effect of decreasing the coupling efficiency of the grating coupler as the input laser power increases is observed.