3　硅基光源既然目前在全硅集成光学中还没有有效实用的硅光源,那么发展硅基光源以满足硅集成光学的发展就非常有必要。这个领域的工作主要集中在异质外延生长和各种键合技术方面。本节主要介绍异质外延硅基光源。3.1　异质结构硅基光源自80年代初兴起研究硅基异质结构的热潮并 3 silicon-based light source Since there is no effective silicon light source in all-silicon integrated optics, it is necessary to develop silicon-based light source to meet the development of silicon integrated optics. Work in this area has focused mainly on heteroepitaxial growth and various bonding techniques. This section mainly introduces heteroepitaxial silicon-based light source. 3.1 Heterostructure The silicon-based light source has been on the rise since the early 1980s to study the heterogeneity of silicon-based heterostructures