A method of concentration analysis based on X-ray photoelectron spectroscopy (XPS) results was introduced. The concentration of Ce-rich conversion coating on the anodized Al based metal matrix composites Al6061/SiCp was then studied according to this method. The results revealed that the Ce conversion coating on the anodized Al6061/SiCp consisted of Al oxide, Ce oxide and Ce hydroxide. The state of Ce element exhibited the mixture of Ce3+ and Ce4+. Some of Celll was oxidized to be CelV in the outer layer coating.