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描述了一台大面积双叠层阳极在 X、Y方向分条读出气体电离室而发展的大面积真空镀膜装置。镀膜腔体内体积为 990 mm× 780 mm× 780 mm。可镀膜面积最大为 960 mm× 750 mm。用该装置为RIBLL电离室镀阴极、X阳极、Y阳极和窗 ,镀膜面积 4 4 0 mm× 160 mm,Mylar膜厚 3.2 6μm,镀银 97.2 7nm,镀银厚度不均匀度为 18.91%。用它制作的 RIBLL电离室的阳极、阴极 ,当电离室工作气压2 5k Pa P10气体 ,阳极电压 2 2 0 V,阴极电压 - 160 0 V时 ,对 5.15Me Vα源测量能量分辨率为 4 .2 %。
Describes a large area double layer anodes developed in the X, Y direction slitting gas ionization chamber and the development of large area vacuum coating device. The volume of the coating chamber is 990 mm × 780 mm × 780 mm. The maximum coating area is 960 mm × 750 mm. The device was used for RIBLL ionization chamber cathode, X anode, Y anode and window, the coating area of 4 4 0 mm × 160 mm, Mylar film thickness of 3.2 6μm, silver 97.2 7nm, silver thickness unevenness of 18.91%. The anode and cathode of the RIBLL ionization chamber made from it were measured with an energy resolution of 4 for the 5.15 Me Vα source at an operating chamber pressure of 25 kPa P10 gas, an anode voltage of 220 V and a cathode voltage of 160 V. 2 %.