本文评述某些薄膜淀积工艺在制备光学薄膜中的可能应用,这些工艺可以归入离子辅助淀积技术大类。热蒸发是最通用的工艺并已发展到各方面的性能都很高的阶段。讨论了可作进一步改进的几个方面,特别是用离子辅助淀积技术进行这种改进的可能性。引言没有光学薄膜镀层,多数现代光学仪器就不能工作。薄膜镀层在减少反射,从而增加透 This article reviews the possible applications of some thin-film deposition processes in the fabrication of optical thin films that fall into the broad category of ion-assisted deposition techniques. Thermal evaporation is the most versatile process and has evolved into a phase where performance is high in all aspects. Several areas for further improvement are discussed, in particular the possibility of making such improvements using ion-assisted deposition techniques. Introduction Without optical thin film coatings, most modern optical instruments do not work. Thin film coatings reduce reflections and thus increase transparency