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设计了一种微气体传感器微热板的电极结构,利用有限元分析工具ANSYS对该微热板的温度场和磁场分布进行了分析和优化,研究了微热板加热电极的宽度和间距对温度分布的影响,并对测量电极的结构进行了优化。结果表明:当微热板加热电极的宽度和间距分别为20μm和10μm且测量电极为无叉指结构时,微热板中心区域能获得高且均匀的温度分布,并且磁场强度最小且分布均匀,这种电极结构有助于消除磁场对测量信号的干扰,提高传感器的整体性能。
The design of a micro-gas sensor micro-hot plate electrode structure, the use of finite element analysis tools ANSYS the micro-hot plate temperature and magnetic field distribution analysis and optimization of the micro-hot plate heating electrode width and spacing of the temperature The influence of the distribution and the structure of the measuring electrode are optimized. The results show that when the width and pitch of the heating electrodes are 20μm and 10μm, respectively, and the measuring electrodes are without interdigital electrodes, high and uniform temperature distribution can be obtained in the central area of the micro-heating plate with minimum and uniform magnetic field distribution. This electrode structure helps to eliminate the magnetic field on the measurement signal interference, improve the overall performance of the sensor.