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以往电子探针主要应用到较厚氧化物表皮断面(>5μm)的成分分析,而对于较薄氧化物表皮,采用散焦电子束从氧化膜表面进行定量分析的方法很少报导。本文描述了对厚度在1.2～2μm的氧化膜从表面进行定量分析的方法。从不同加速电压获得的成分,推导了氧化膜内各层成分的计算公式。因而可以间接起到离子探针剥层分析的作用。本方法应用到Fe-15C合金氧化膜的分析,获得了以富铈质点为核心加速保护性Cr_2O_5形成的实验证据:对铈改善Fe-15Cr合金抗氧化性的作用机制做了简单的讨论。
In the past, the electron probe was mainly applied to the composition analysis of the thicker oxide skin section (> 5 μm), whereas the method of quantitatively analyzing the surface of the oxide layer using the defocused electron beam was scarcely reported for the thin oxide skin. This paper describes a method of quantitatively analyzing the surface of an oxide film with a thickness of 1.2 to 2 μm. Based on the components obtained from different acceleration voltages, the formulas for calculating the composition of each layer in the oxide film were deduced. Which can indirectly play the role of ion probe peel analysis. The method is applied to the analysis of the oxide film of Fe-15C alloy, and the experimental evidence that accelerating the formation of protective Cr 2 O 5 with the cerium-rich particle as core is obtained. The mechanism of cerium improving the oxidation resistance of Fe-15Cr alloy is briefly discussed.