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电子吸附过程对于电负性气体的物理特性和化学特性都起着重要的作用。为此,采用脉冲电子源,配合经过优化设计的迁移管,简便有效地实现了大气压下电负性气体电子吸附截面数据的测量。首先对迁移管电场进行了优化设计,接着研究了脉冲电压峰值、迁移管长度和迁移电场强度对到达法拉第板电子数n_(e0)的影响规律;然后探讨了高电负性气样配置的方法,最后测量了几种SF_6分解产物的电子吸附截面数据,测量的气体包括SO_2、CF_4、SOF_2、SO_2F_2和SF_6。研究结果表明:所提出的方法能有效地测量电负性气体的电子吸附截面;迁移管中电场的均匀程度主要受迁移环厚度与迁移环间绝缘层厚度之比的影响,该比值越小,电场就越均匀;脉冲峰值电压对到达法拉第板电子数n_(e0)影响不大;在短迁移管情况下,迁移电场强度对ne0有较大影响,在长迁移管情况下则影响不大;电场均匀程度和气样质量浓度是影响测量准确度的主要因素。
The electron adsorption process plays an important role in the physical and chemical properties of the electronegative gas. To this end, the use of pulsed electron source, coupled with the optimized design of the transfer tube, simply and effectively to achieve the atmospheric pressure electronegativity gas electron absorption cross section data measurement. Firstly, the electric field of the transfer tube was optimized. Then the influence of the pulse voltage peak, the length of the transfer tube and the electric field of the transfer on the number of electrons arriving at the Faraday plate n_ (e0) was studied. Then, Finally, the electron cross section data of several SF_6 decomposition products were measured. The measured gases include SO_2, CF_4, SOF_2, SO_2F_2 and SF_6. The results show that the proposed method can effectively measure the electron adsorption cross section of electronegative gas. The uniformity of the electric field in the transfer tube is mainly affected by the ratio of the thickness of the transfer ring and the thickness of the insulation layer between the transfer rings. The more uniform the electric field; the peak pulse voltage has little effect on the number of electrons reaching the Faraday plate n e0; in the case of short transfer tubes, the intensity of the transferred electric field has a greater effect on ne0 and less on the case of long drift tubes; The uniformity of electric field and gas mass concentration are the main factors affecting the accuracy of measurement.