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采用电化学沉积法开展液相中类金刚石薄膜的制备工艺和理论的研究,对于完善类金刚石薄膜的合成技术,开拓类金刚石薄膜的应用领域,具有很重要的理论意义和实用价值。本文概述了液相电沉积技术的基本原理和方法,重点从四个方面介绍了电化学方法制备类金刚石薄膜的研究进展,总结了该方法所制备样品的性能,并对可能的反应机制作了综合性的阐述,最后对液相电沉积类金刚石薄膜的发展前景进行了展望。
The electrochemical deposition of diamond-like carbon in the liquid phase preparation process and theoretical research, to improve the synthesis of diamond-like carbon film technology, to develop diamond-like carbon film applications, has very important theoretical and practical value. In this paper, the basic principles and methods of liquid phase electrodeposition are summarized. The research progress of electrochemical method for preparation of diamond-like carbon (DLC) films is introduced in four aspects. The performance of the prepared samples is summarized. The possible reaction mechanism In the end, the future development of liquid-like electrodeposited diamond films is prospected.