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近年 ,硅基低维材料物理与工艺的研究预示 ,硅基光电子学将是今后半导体光电子学的一个主要发展方向 ,而对硅基纳米材料的研究一直是本领域的一个研究热点 ,评述了近年硅基纳米材料在制备技术方面所取得的新进展 ,并展望了今后的发展方向。
In recent years, the research of silicon-based low-dimensional material physics and technology has indicated that silicon-based optoelectronics will be a major development direction of semiconductor optoelectronics in the future. However, the research on silicon-based nanomaterials has been a hot spot in this field, Silicon-based nanomaterials in the preparation of new progress made, and look forward to the future direction of development.