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采用激光分子束外延法先在Si(111)衬底上制备Zn薄膜,在不同的氧气体积流量和生长温度下,用热蒸发法在镀有Zn薄膜的Si(111)衬底上制备了不同形貌的ZnO纳米晶须。分别用X射线衍射(XRD)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)和高分辨透射电子显微镜(HRTEM)对样品的成分、微结构和形貌进行了表征。Zn薄膜在高温下被氧化,并为晶体生长提供均匀的成核点,有利于形成一定大小和数量的ZnO晶核。研究结果表明,氧气体积流量和生长温度对ZnO纳米晶须的形貌有一定的影响。
A Zn thin film was first prepared on a Si (111) substrate by laser molecular beam epitaxy. The Zn (111) substrate was prepared by thermal evaporation at different oxygen volume flow rates and growth temperatures Morphology of ZnO nanowhiskers. The composition, microstructure and morphology of the samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and high resolution transmission electron microscopy (HRTEM) The Zn thin films are oxidized at high temperature and provide uniform nucleation sites for crystal growth, which facilitates the formation of ZnO nuclei of a certain size and number. The results show that the volume flow rate and growth temperature of oxygen have a certain influence on the morphology of ZnO nanowhiskers.