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The patterning technologies and process order of high TC(86K) super-conducting film bolometers have been studied. After the deposition, a conventional lithographic process was used to pattern the films with aqueous solution of HCl, and then the films were transferred into a tube furnace for annealing to form superconducting film. It eliminates the degradation of patterning process. The bolometric responsivity of approximately 34. 32 V/W is measured, and the detectivity is greater than 1. 62×108cm · Hz1/2 ·W-1, the noise equivalent powers NEP is 2. 1×10-9W.
The patterning technologies and process order of high TC (86K) super-conducting film bolometers have been studied. After the deposition, a conventional lithographic process was used to pattern the films with aqueous solution of HCl, and then the films were transferred into a tube The bolometric responsivity of approximately 34. 32 V / W is measured, and the detectivity is greater than 1.62 × 108 cm · Hz1 / 2 · W-1, the noise equivalent powers NEP is 2. 1 × 10-9W.