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简介ＭＥＭＳ（微型机电系统）自八十年代以来就应用于医疗行业，在各种硅压力传感器、加速度传感器和定制的微结构应用中大显身手。ＭＥＭＳ器件与其他技术相比有许多优点。它们尺寸小，性能可靠，价格便宜。硅是很容易用于ＭＥＭＳ器件结构加工的材料。用于生产硅电子元件的?
Introduction MEMS (Micro Electro Mechanical Systems) has been used in the medical industry since the 1980s and has demonstrated itself in a variety of silicon pressure sensors, acceleration sensors, and custom microstructured applications. MEMS devices have many advantages over other technologies. They are small in size, reliable in performance, and inexpensive in price. Silicon is a very easy to use material for the fabrication of MEMS devices. For the production of silicon electronic components?