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利用摩擦学试验及 XPS测试考察了非平衡纳米复合等离子体镀膜技术沉积的 Mo S2 基纳米复合薄膜的抗潮湿性和耐磨寿命等 .结果表明 ,在相对湿度 (RH)为 6 0 %～ 70 %的环境下储存后 ,Ti N- Mo S2 薄膜的摩擦学性能迅速降低直至失效 ;而 Ti N- Mo S2 / Ti和 Ti N- Mo S2 / Ti N复合膜的抗潮湿性能显著提高 .因而 Ti和 (或 ) N2 的适量添加显著增强了 Mo S2 基复合薄膜的抗潮湿及耐磨性能
The tribological properties and wear resistance of Mo S2-based nanocomposite films deposited by unbalanced nanocomposite plasma deposition technique were investigated by tribological test and XPS test. The results showed that when the relative humidity (RH) was 60% ~ 70 % Of the environment, the tribological properties of the TiN-MoS2 thin films decrease rapidly until they fail, while the moisture resistance of the TiN-MoS2 / Ti and TiN-MoS2 / TiN composite films significantly increases. And (or) the amount of N2 added significantly enhance the Mo S2-based composite film moisture resistance and wear resistance