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用透射电镜（ＴＥＭ）对大气中火焰法沉积（ＣＦＤ）金刚石薄膜的组织结构进行了分析研究。结果表明，所沉积的金刚石晶体中｛１１１｝面上存在着大量层错及显微孪晶；在｛１１１｝面上晶粒边界处的位错密度较低。此外，在金刚石薄膜中还观察到存在于金刚石颗粒间的非金刚石型碳（Ｃ），即无定形碳及微晶石墨。
The structure of flame-induced deposition (CFD) diamond films in the atmosphere was analyzed by transmission electron microscopy (TEM). The results show that there are a large number of layer faults and micro-twins in the {111} plane of the deposited diamond crystal and a lower dislocation density at the grain boundaries of the {111} plane. In addition, non-diamond-type carbon (C) existing between diamond grains, ie, amorphous carbon and microcrystalline graphite, was also observed in the diamond thin film.