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In this work, the breakdown characteristics of AlGaN/GaN planar Schottky barrier diodes(SBDs) fabricated on the silicon substrate are investigated. The breakdown voltage(BV) of the SBDs first increases as a function of the anodeto-cathode distance and then tends to saturate at larger inter-electrode spacing. The saturation behavior of the BV is likely caused by the vertical breakdown through the intrinsic GaN buffer layer on silicon, which is supported by the postbreakdown primary leakage path analysis with the emission microscopy. Surface passivation and field plate termination are found effective to suppress the leakage current and enhance the BV of the SBDs. A high BV of 601 V is obtained with a low on-resistance of 3.15 mΩ·cm2.
The breakdown voltage (BV) of the SBDs first increase as a function of the anodeto-cathode distance and then tends to saturate at the larger inter-electrode spacing. The saturation behavior of the BV is likely caused by the vertical breakdown through the intrinsic GaN buffer layer on silicon, which is supported by the postbreakdown primary leakage path analysis with the emission microscopy. Surface passivation and field plate A high BV of 601 V is obtained with a low on-resistance of 3.15 mΩ · cm2.