前言随着科学技术的发展,特别是激光技术、微电子学技术和空间技术的发展,对高精度光学零件需求越来越大、精度要求越来越高。其精度要求,磨制方法及检测手段、已成为光学冷加工行业所关注的一个重要课题。近几年来,我们先后磨制了φ50毫米、φ100毫米、φ150毫米等不同口径的光学标准平板,其精度可稳定在1/30λ～1/4λ。本文介绍φ150毫米标准板的磨制。 Preface With the development of science and technology, especially the development of laser technology, microelectronics technology and space technology, the demand for high-precision optical components is more and more large, and the accuracy requirements are getting higher and higher. Its precision requirements, grinding methods and testing methods, has become the optical cold-working industry an important issue of concern. In recent years, we have successively polished optical standard plates of φ50 mm, φ100 mm, φ150 mm, etc., with the accuracy of 1 / 30λ ~ 1 / 4λ. This article describes the φ150 mm standard plate grinding.