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设计和制作了一种高速铌酸锂电光调制器。波导采用双Y定向耦合器型结构以提高线性度,同时能够提高工艺容差;电极采用CPW行波电极结构。通过分析比较不同相速匹配程度及微波损耗程度对电极系统带宽的影响,选择合适的设计参数及工艺参数,制作的调制器样品插入损耗为3dB,开关消光比为34dB,偏置电极半波电压为7V,行波电极半波电压为5.5V,电反射小于-10dB,6dB调制带宽约18GHz,可实现0～18GHz模拟调制。
A high-speed lithium niobate electro-optic modulator was designed and fabricated. Waveguide dual Y directional coupler type structure to improve the linearity, while improving process tolerance; electrodes using CPW traveling wave electrode structure. By analyzing the influence of different phase-velocity matching and microwave loss on the bandwidth of the electrode system, the suitable design parameters and process parameters were selected. The insertion loss of the fabricated sample was 3 dB, the switching extinction ratio was 34 dB, the half- Is 7V, traveling wave electrode half-wave voltage is 5.5V, electrical reflection is less than -10dB, 6dB modulation bandwidth is about 18GHz, can realize 0 ~ 18GHz analog modulation.