世界上的巨型半导体企业如Intel和台积电等将率先从2011年后启动开发22 nm以下的微细化量产技术,同时还都认为,2013年后可望量产化的15 nm技术是半导体加工工艺发展道路上的一个转折点。其表现为逻辑电路上现用的CMOS平面体管,将转变为具有3维沟道导向的立体晶体管。这一转变势必严重 The world’s giant semiconductor companies such as Intel and TSMC will be the first to start developing their miniaturized production technology below 22 nm after 2011. They also think that the 15 nm technology expected to be mass-produced after 2013 is a semiconductor processing technology A turning point on the road to development. The performance of CMOS logic transistors used in the body, will be transformed into a three-dimensional channel-oriented three-dimensional transistor. This change is bound to be serious